ion beam sputtering meaning in English
离子束溅射
Examples
- Ion beam sputtering system
离子束溅镀系统 - Property comparison of optical thin films prepared by e - beam , ion assisted deposition and ion beam sputtering
离子辅助和离子束溅射三种工艺对光学薄膜性能的影响 - A control system for the thickness of ion beam sputter ( ibs ) coating is introduced in this paper . the basic principle of ibs coating machine is discussed . this paper also gives the scheme of hardware and sofeware
本文介绍了离子束溅射镀膜机膜厚控制的一种实用的系统，文中论述了离子束溅射镀膜机的工作原理及镀膜厚度控制系统的硬、软件的实现方案。 - The results about the research on the characters of ion beam sputtering show that grid voltage and sputtering gas pressure have great influences on ion beam distribution and current . accelerate voltage has less effect on these properties
溅射特性研究结果表明：屏极电压和溅射气压对离子束均匀性和束流密度影响显著；加速电压对两者影响较小；石墨靶的最佳入射角为50 。 - In this thesis , we research the characters on the ion beam sputtering system , and prepare tiny films and cnx / tiny multilayers by ion beam sputtering . the best parameters of preparing cnx films are explored . we use the tiny films as template to promote the growth of cnx films
本文对离子源的溅射特性进行了研究，采用离子束溅射法制备了tin _ y单层薄膜和cn _ x tin _ y多层薄膜，探索该法制备cn _ x薄膜的最佳工艺参数，并利用tin _ y薄膜为衬底以促进cn _ x薄膜的生长。